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Authors: Beck, Alexander D.
Haufe, Stefan
Tillmann, Jan
Waldvogel, Siegfried R.
Title: Challenges in the electrochemical synthesis of Si2Cl6 starting from tetrachlorosilane and trichlorosilane
Online publication date: 24-Oct-2022
Year of first publication: 2022
Language: english
Abstract: The strongly increasing demand for nano- and microelectronics calls for new and environmentally benign reaction pathways for the preparation of one of the most important substrates in the production of semiconductor materials: Si2Cl6. We present a comprehensive study of the opportunities and challenges for the selective electrochemical formation of higher halo-functionalized silanes to Si2Cl6 achieved by cyclic voltammetry measurements and electrochemical synthesis. Cathodic dehalo-dimerization reaction of SiCl4 and the approach to halogen exchange for better substrate reduction are envisioned. An anodic halide-free dimerization pathway by dehydrogenation of HSiCl3 is investigated, including Lewis acid activation of the Si−H bond. In addition, tertiary amine-driven, Benkeser-like in-situ formation of a SiCl3− anion was tested as well. The target molecule Si2Cl6 is strongly promoted to direct electro-conversions making the anodic and cathodic electrosynthesis very challenging.
DDC: 540 Chemie
540 Chemistry and allied sciences
Institution: Johannes Gutenberg-Universität Mainz
Department: FB 09 Chemie, Pharmazie u. Geowissensch.
Place: Mainz
Version: Published version
Publication type: Zeitschriftenaufsatz
License: CC BY-NC-ND
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Journal: ChemElectroChem
Pages or article number: e202101374
Publisher: Wiley-VCH
Publisher place: Weinheim
Issue date: 2022
ISSN: 2196-0216
Publisher DOI: 10.1002/celc.202101374
Appears in collections:JGU-Publikationen

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