Mechanically stable PMMA-based large-area nano-channels with sub-10 nm depth

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dc.contributor.authorLiu, Min
dc.contributor.authorReimer, Tobias
dc.contributor.authorWang, Yongkang
dc.contributor.authorKläui, Mathias
dc.contributor.authorXing, Yaowen
dc.contributor.authorGui, Xiahui
dc.contributor.authorCao, Yijun
dc.contributor.authorBerger, Rüdiger
dc.contributor.authorWang, Hai
dc.contributor.authorBonn, Mischa
dc.date.accessioned2025-01-27T08:47:09Z
dc.date.available2025-01-27T08:47:09Z
dc.date.issued2024
dc.date.updated2025-01-22T09:32:05Z
dc.identifier.doihttp://doi.org/10.25358/openscience-11279
dc.identifier.urihttps://openscience.ub.uni-mainz.de/handle/20.500.12030/11300
dc.language.isoengde
dc.rightsCC-BY-4.0*
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/*
dc.subject.ddc530 Physikde_DE
dc.subject.ddc530 Physicsen_GB
dc.titleMechanically stable PMMA-based large-area nano-channels with sub-10 nm depthen_GB
dc.typeZeitschriftenaufsatzde
elements.object.id177688
elements.object.labelsAFM-IR spectroscopy
elements.object.labelsnano-channels
elements.object.labelsnanofluidics
elements.object.labelsPMMA
elements.object.labelssagging depth
elements.object.labels34 Chemical sciences
elements.object.labels40 Engineering
elements.object.labels51 Physical sciences
elements.object.typejournal-article
jgu.journal.titleAdvanced Materials Technologiesde
jgu.journal.volumeVersion of Record (VoR)de
jgu.organisation.departmentFB 08 Physik, Mathematik u. Informatikde
jgu.organisation.nameJohannes Gutenberg-Universität Mainz
jgu.organisation.number7940
jgu.organisation.placeMainz
jgu.organisation.rorhttps://ror.org/023b0x485
jgu.pages.alternative2401172de
jgu.publisher.doi10.1002/admt.202401172de
jgu.publisher.issn2365-709Xde
jgu.publisher.nameWileyde
jgu.publisher.placeWeinheimde
jgu.publisher.year2024
jgu.rights.accessrightsopenAccess
jgu.subject.ddccode530de
jgu.type.dinitypeArticleen_GB
jgu.type.resourceTextde
jgu.type.versionPublished versionde

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