Ion implantation and transmission microscopy with nanometer resolution using a deterministic ion source

Jacob, Georg2017-07-032017-07-042017https://openscience.ub.uni-mainz.de/handle/20.500.12030/879engInC-1.0https://rightsstatements.org/vocab/InC/1.0/530 Physik530 PhysicsIon implantation and transmission microscopy with nanometer resolution using a deterministic ion sourceDissertationurn:nbn:de:hebis:77-diss-1000013978x, 125 Seiten